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BSI PD IEC/TS 62622:2012:2013 Edition

BSI PD IEC/TS 62622:2012:2013 Edition

$167.15

Nanotechnologies. Description, measurement and dimensional quality parameters of artificial gratings

Published By Publication Date Number of Pages
BSI 2013 44
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This technical specification specifies the generic terminology for the global and local quality parameters of artificial gratings, interpreted in terms of deviations from nominal positions of grating features, and provides guidance on the categorization of measurement and evaluation methods for their determination.

This specification is intended to facilitate communication among manufacturers, users and calibration laboratories dealing with the characterization of the dimensional quality parameters of artificial gratings used in nanotechnology.

This specification supports quality assurance in the production and use of artificial gratings in different areas of application in nanotechnology. Whilst the definitions and described methods are universal to a large variety of different gratings, the focus is on one-dimensional (1D) and two-dimensional (2D) gratings.

PDF Catalog

PDF Pages PDF Title
4 CONTENTS
6 FOREWORD
8 INTRODUCTION
9 1 Scope
2 Normative references
3 Terms and definitions
3.1 Basic terms
10 Figures
FigureĀ 1 ā€“ Example of a trapezoidal line feature on a substrate
11 FigureĀ 2 ā€“ Examples of feature patterns
12 3.2 Grating terms
13 3.3 Grating types
14 FigureĀ 3 ā€“ Examples of 1D line gratings
15 FigureĀ 4 ā€“ Example of 2D gratings
16 3.4 Grating quality parameter terms
19 3.5 Measurement method categories for grating characterization
20 4 Symbols and abbreviated terms
5 Grating calibration and quality characterization methods
5.1 Overview
5.2 Global methods
21 5.3 Local methods
22 5.4 Hybrid methods
5.5 Comparison of methods
23 5.6 Other deviations of grating features
5.6.1 General
5.6.2 Out of axis deviations
Tables
TableĀ 1 ā€“ Comparison of different categories for grating characterization methods
24 5.6.3 Out of plane deviations
5.6.4 Other feature deviations
25 5.7 Filter algorithms for grating quality characterization
6 Reporting of grating characterization results
6.1 General
26 6.2 Grating specifications
6.3 Calibration procedure
6.4 Grating quality parameters
27 Annex A (informative) Background information and examples
29 FigureĀ A.1 ā€“ Result of a calibration of a 280 mm length encoder system which was used as a transfer standard in an international comparison [31]
30 FigureĀ A.2 ā€“ Filtered (linear profile Spline filter with Ī»c = 25 mm) results of Figure A.1
TableĀ A.1 ā€“ Grating quality parameters of the grating in FiguresĀ A.1 and A.2
32 FigureĀ A.3 ā€“ Calibration of a 1D grating by a metrological SEM
TableĀ A.2 ā€“ Grating quality parameters of the grating in FigureĀ A.3
33 FigureĀ A.4 ā€“ Calibration of pitch and straightness deviations on a 2D grating by a metrological SEM
34 TableĀ A.3 ā€“ Grating quality parameters of the grating in FigureĀ A.4
35 FigureĀ A.5 ā€“ Results of an international comparison on a 2D grating by different participants and types of instruments
36 Annex B (informative) Bravais lattices
FigureĀ B.1 ā€“ One-dimensional Bravais lattice
37 FigureĀ B.2 ā€“ The five fundamental two-dimensional Bravais lattices illustrating the primitive vectors a and b and the angle Ļ† between them
38 FigureĀ B.3 ā€“ The 14 fundamental three-dimensional Bravais lattices
39 Table B.1 ā€“ Bravais lattices volumes
40 Bibliography

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