BSI PD ISO/TR 19319:2013
$215.11
Surface chemical analysis. Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods
| Published By | Publication Date | Number of Pages |
| BSI | 2013 | 126 |
This Technical Report describes:
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Functions and their relevance to lateral resolution:
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Point spread function (PSF) — see 4.1.1
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Line spread function (LSF) — see 4.1.2
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Edge spread function (ESF) — see 4.1.3
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Modulation transfer function (MTF) — see 4.1.4
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Contrast transfer function (CTF) — see 4.1.5.
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Experimental methods for the determination of lateral resolution and parameters related to lateral resolution:
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Imaging of a narrow stripe — see 4.2
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Imaging of a sharp edge — see 4.3
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Imaging of square-wave gratings — see 4.4.
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Physical factors affecting lateral resolution, analysis area and sample area viewed by the analyser in Auger electron spectroscopy and X-ray photoelectron spectroscopy — see Clauses 5 and 6.
PDF Catalog
| PDF Pages | PDF Title |
|---|---|
| 6 | Foreword |
| 7 | Introduction |
| 9 | Section sec_1 Section sec_2 1 Scope 2 Terms and definitions |
| 12 | Section sec_3 3 Symbols and abbreviated terms |
| 15 | Section sec_4 Section sec_4.1 Section sec_4.1.1 4 Determination of lateral resolution and sharpness by imaging of stripe patterns 4.1 Theoretical background |
| 16 | Figure fig_1 Figure fig_2 |
| 17 | Section sec_4.1.2 Section sec_4.1.3 |
| 18 | Figure fig_3 |
| 19 | Figure fig_4 Section sec_4.1.4 |
| 20 | Figure fig_5 |
| 21 | Figure fig_6 |
| 22 | Figure fig_7 Section sec_4.1.5 |
| 23 | Figure fig_8 |
| 24 | Figure fig_9 Section sec_4.1.6 |
| 25 | Figure fig_10 Section sec_4.1.7 |
| 26 | Table tab_1 |
| 27 | Table tab_2 |
| 28 | Table tab_3 |
| 29 | Section sec_4.2 Section sec_4.2.1 Figure fig_11 4.2 Determination of the line spread function and the modulation transfer function by imaging of a narrow stripe |
| 30 | Figure fig_12 |
| 31 | Figure fig_13 Section sec_4.2.2 Figure fig_14 |
| 32 | Figure fig_15 |
| 33 | Figure fig_16 Section sec_4.2.3 |
| 34 | Figure fig_17 |
| 35 | Figure fig_18 |
| 36 | Figure fig_19 |
| 37 | Figure fig_20 |
| 38 | Figure fig_21 Section sec_4.2.4 |
| 39 | Figure fig_22 |
| 40 | Figure fig_23 |
| 41 | Figure fig_24 Section sec_4.2.5 |
| 42 | Figure fig_25 |
| 43 | Figure fig_26 |
| 44 | Figure fig_27 Section sec_4.2.6 |
| 46 | Figure fig_28 |
| 47 | Figure fig_29 Figure fig_30 |
| 49 | Section sec_4.3 4.3 Determination of the edge spread function (ESF) by imaging a straight edge |
| 50 | Figure fig_31 Section sec_4.3.1 |
| 51 | Figure fig_32 Figure fig_33 |
| 52 | Figure fig_34 Figure fig_35 Section sec_4.3.2 |
| 53 | Figure fig_36 Figure fig_37 |
| 54 | Table tab_4 Section sec_4.3.3 |
| 55 | Figure fig_38 |
| 56 | Figure fig_39 Section sec_4.3.4 |
| 57 | Figure fig_40 Section sec_4.3.5 |
| 59 | Figure fig_41 |
| 61 | Figure fig_42 |
| 62 | Figure fig_43 |
| 63 | Table tab_5 |
| 64 | Section sec_4.4 4.4 Determination of lateral resolution by imaging of square-wave gratings |
| 65 | Section sec_4.4.1 Section sec_4.4.1.1 Figure fig_44 |
| 66 | Section sec_4.4.1.2 Figure fig_45 |
| 67 | Section sec_4.4.1.3 Figure fig_46 |
| 68 | Figure fig_47 Section sec_4.4.2 |
| 69 | Figure fig_48 |
| 70 | Figure fig_49 |
| 71 | Figure fig_50 |
| 72 | Section sec_4.4.2.1 Figure fig_51 |
| 73 | Section sec_4.4.2.2 |
| 74 | Figure fig_52 |
| 75 | Figure fig_53 Figure fig_54 |
| 77 | Figure fig_55 Section sec_4.4.2.3 |
| 78 | Figure fig_56 |
| 79 | Section sec_4.4.2.4 |
| 80 | Figure fig_57 |
| 81 | Table tab_6 |
| 82 | Figure fig_58 Section sec_4.4.3 |
| 83 | Section sec_4.4.3.1 Section sec_4.4.3.2 |
| 84 | Figure fig_59 |
| 85 | Figure fig_60 |
| 86 | Table tab_7 |
| 87 | Figure fig_61 Section sec_4.4.3.3 |
| 89 | Figure fig_62 |
| 90 | Section sec_4.4.3.4 |
| 91 | Table tab_8 Table tab_9 |
| 92 | Figure fig_63 Table tab_10 Section sec_4.4.3.5 |
| 93 | Figure fig_64 |
| 94 | Figure fig_65 |
| 95 | Figure fig_66 Section sec_4.4.4 |
| 97 | Figure fig_67 |
| 98 | Table tab_11 |
| 99 | Figure fig_68 |
| 101 | Figure fig_69 |
| 102 | Figure fig_70 Section sec_4.4.5 |
| 103 | Figure fig_71 |
| 104 | Figure fig_72 Section sec_5 Section sec_5.1 5 Physical factors affecting lateral resolution, analysis area and sample area viewed by the analyser in AES and XPS 5.1 General information |
| 105 | Section sec_5.2 Section sec_5.2.1 5.2 Lateral resolution of AES and XPS |
| 106 | Figure fig_73 |
| 107 | Figure fig_74 Figure fig_75 Section sec_5.2.2 |
| 108 | Figure fig_76 |
| 110 | Figure fig_77 |
| 111 | Figure fig_78 Section sec_5.2.3 |
| 112 | Section sec_5.3 Section sec_5.3.1 Section sec_5.3.2 Figure fig_79 5.3 Analysis area |
| 113 | Section sec_5.3.3 |
| 114 | Section sec_5.4 5.4 Sample area viewed by the analyser |
| 115 | Figure fig_80 Section sec_6 Section sec_6.1 6 Measurements of analysis area and sample area viewed by the analyser in AES and XPS 6.1 General information |
| 116 | Section sec_6.2 6.2 Analysis area |
| 117 | Section sec_6.3 6.3 Sample area viewed by the analyser |
| 118 | Annex sec_A Figure fig_A.1 Annex A (informative) Reduction of image period for 3-stripe gratings |
| 119 | Figure fig_A.2 |
| 120 | Table tab_A.1 |
| 121 | Reference ref_1 Reference ref_2 Reference ref_3 Reference ref_4 Reference ref_5 Reference ref_6 Reference ref_7 Reference ref_8 Reference ref_9 Reference ref_10 Reference ref_11 Reference ref_12 Reference ref_13 Reference ref_14 Reference ref_15 Reference ref_16 Reference ref_17 Reference ref_18 Reference ref_19 Bibliography |
| 122 | Reference ref_20 Reference ref_21 Reference ref_22 Reference ref_23 Reference ref_24 Reference ref_25 Reference ref_26 Reference ref_27 Reference ref_28 Reference ref_29 Reference ref_30 Reference ref_31 Reference ref_32 Reference ref_33 Reference ref_34 Reference ref_35 Reference ref_36 Reference ref_37 Reference ref_38 Reference ref_39 |
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