ASTM-E1438:1996 Edition

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E1438-91(1996) Standard Guide for Measuring Widths of Interfaces in Sputter Depth Profiling Using SIMS

Published By	Publication Date	Number of Pages
ASTM	1996

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Description

ASTM E1438-91-Reapproved1996

Historical Standard: Standard Guide for Measuring Widths of Interfaces in Sputter Depth Profiling Using SIMS

ASTM E1438

Scope

1.1 This guide provides the SIMS analyst with a method for determining the width of interfaces from SIMS sputtering data obtained from analyses of layered specimens. This guide does not apply to data obtained from analyses of specimens with thin markers or specimens without interfaces such as ion-implanted specimens.

1.2 This guide does not describe methods for the optimization of interface width or the optimization of depth resolution.

1.3 This standard does not purport to address all of the safety problems, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

Keywords

data analysis-spectrochemical; depth resolution; interface width; profile distortion; secondary ion mass spectrometry (SIMS)

ICS Code

ICS Number Code n/a

DOI: 10.1520/E1438-91R96

Additional information

Standard Title	E1438-91(1996) Standard Guide for Measuring Widths of Interfaces in Sputter Depth Profiling Using SIMS
Published Code	ASTM
Publication Date	1996