ASTM-E673 2002
$40.63
E673-02a Standard Terminology Relating to Surface Analysis
| Published By | Publication Date | Number of Pages |
| ASTM | 2002 | 10 |
ASTM E673-02a
Historical Standard: Standard Terminology Relating to Surface Analysis
ASTM E673
Scope
1.1 This terminology is related to the various disciplines involved in surface analysis.
1.2 The definitions listed apply to (a) Auger electron spectroscopy (AES), (b) X-ray photoelectron spectroscopy (XPS), (c) ion-scattering spectroscopy (ISS), (d) secondary ion mass spectrometry (SIMS), and (e) energetic ion analysis (EIA).
Keywords
terminology; surface analysis
ICS Code
ICS Number Code 01.040.17 (Metrology and measurement. Physical phenomena (Vocabularies))
DOI: 10.1520/E0673-02A
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