ASTM-E673 2003

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E673-03 Standard Terminology Relating to Surface Analysis

Published By	Publication Date	Number of Pages
ASTM	2003	10

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Categories: 01.040.17 - Metrology and measurement. Physical phenomena (Vocabularies), ASTM

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Description

ASTM E673-03

Withdrawn Standard: Standard Terminology Relating to Surface Analysis (Withdrawn 2012)

ASTM E673

Scope

1.1 This terminology is related to the various disciplines involved in surface analysis.

1.2 The definitions listed apply to (a) Auger electron spectroscopy (AES), (b) X-ray photoelectron spectroscopy (XPS), (c) ion-scattering spectroscopy (ISS), (d) secondary ion mass spectrometry (SIMS), and (e) energetic ion analysis (EIA).

Keywords

terminology; surface analysis

ICS Code

ICS Number Code 01.040.17 (Metrology and measurement. Physical phenomena (Vocabularies))

DOI: 10.1520/E0673-03

Additional information

Standard Title	E673-03 Standard Terminology Relating to Surface Analysis
Published Code	ASTM
Publication Date	2003
Pages Count	10
ICS Codes	01.040.17 - Metrology and measurement. Physical phenomena (Vocabularies)

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ASTM-E673 2003

ASTM E673-03

Withdrawn Standard: Standard Terminology Relating to Surface Analysis (Withdrawn 2012)

ASTM E673

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