šŸ”„šŸ”„ Donā€™t Miss Out on Our End of Autumn Sale. If you have any questions, feel free to click the bottom right corner to contact our customer service..

Concat us[email protected]
Shopping Cart

No products in the cart.

šŸ”
ASTM-F1366:1997 Edition

ASTM-F1366:1997 Edition

$40.63

F1366-92(1997)e1 Standard Test Method for Measuring Oxygen Concentration in Heavily Doped Silicon Substrates by Secondary Ion Mass Spectrometry

Published By Publication Date Number of Pages
ASTM 1997 5
PDF Format Searchable Printable Preview Now
Guaranteed Safe Checkout
Category:

If you have any questions, feel free to reach out to our online customer service team by clicking on the bottom right corner. Weā€™re here to assist you 24/7.
Email:[email protected]

ASTM F1366-92-e1-Reapproved1997

Historical Standard: Standard Test Method for Measuring Oxygen Concentration in Heavily Doped Silicon Substrates by Secondary Ion Mass Spectrometry

ASTM F1366

Scope

1.1 This test method covers the determination of total oxygen concentration in the bulk of single crystal silicon substrates using secondary ion mass spectrometry (SIMS).

1.2 This test method can be used for silicon in which the dopant concentrations are less than 0.2% (1 X 10 20 atoms/ cm ) for boron, antimony, arsenic, and phosphorus. This test method is especially applicable for silicon that has resistivity between 0.0012 and 1.0 [omega]-cm for -type silicon and between 0.008 and 0.2 [omega]-cm for -type silicon.

1.3 This test method can be used for silicon in which the oxygen content is greater than the SIMS instrumental oxygen background as measured in a float zone silicon sample, but the test method has a useful precision especially when the oxygen content is much greater (approximately 10X to 20X) than the measured oxygen background in the float zone silicon.

1.4 This test method is complementary to infrared absorption spectroscopy that can be used for the measurement of interstitial oxygen in silicon that has resistivity greater than 1.0 [omega]-cm for -type silicon and greater than 0.1 [omega]-cm for -type silicon (see Test Method F1188). The infrared absorption measurement can be extended to between 0.02 and 0.1 [omega]-cm for -type silicon with minor changes in the measurement procedure.

1.5 In principle, different sample surfaces can be used, but the precision estimate was taken from data on chemical-mechanical polished surfaces.

1.6 This standard does not purport to address all of the safety problems, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

Keywords

FTIR; oxygen; secondary ion mass spectometry; silicon

ICS Code

ICS Number Code n/a

DOI: 10.1520/F1366-92R97E01

Related products

ASTM-F1366
$40.63