🔥🔥 Don’t Miss Out on Our End of Autumn Sale. If you have any questions, feel free to click the bottom right corner to contact our customer service..

Concat us[email protected]
Shopping Cart

No products in the cart.

🔍
ASTM-F1396:2012 Edition

ASTM-F1396:2012 Edition

$40.63

F1396-93(2012) Standard Test Method for Determination of Oxygen Contribution by Gas Distribution System Components

Published By Publication Date Number of Pages
ASTM 2012 8
PDF Format Searchable Printable Preview Now
Guaranteed Safe Checkout
Categories: ,

If you have any questions, feel free to reach out to our online customer service team by clicking on the bottom right corner. We’re here to assist you 24/7.
Email:[email protected]

ASTM F1396-93-Reapproved2012

Historical Standard: Standard Test Method for Determination of Oxygen Contribution by Gas Distribution System Components

ASTM F1396

Scope

1.1 This test method covers a procedure for testing components for oxygen contribution to ultra-high purity gas distribution systems at ambient temperature. In addition, this test method allows testing of the component at elevated ambient temperatures as high as 70°C.

1.2 This test method applies to in-line components containing electronics grade materials such as those used in a semiconductor gas distribution system.

1.3 Limitations:

1.3.1 This test method is limited by the sensitivity of current instrumentation, as well as the response time of the instrumentation. This test method is not intended to be used for test components larger than 12.7-mm (1/2-in.) outside diameter nominal size. This test method could be applied to larger components; however, the stated volumetric flow rate may not provide adequate mixing to ensure a representative sample. Higher flow rates may improve the mixing but excessively dilute the sample.

1.3.2 This test method is written with the assumption that the operator understands the use of the apparatus at a level equivalent to six months of experience.

1.4 The values stated in SI units are to be regarded as the standard. The inch-pound units given in parentheses are for information only.

1.5 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. Specific hazard statements are given in Section 6.

Keywords

components; contamination; gas distribution; oxygen analyzer; oxygen contribution; oxygen outgassing; semiconductor processing

ICS Code

ICS Number Code 23.040.01 (Pipeline components in general. Pipelines)

DOI: 10.1520/F1396-93R12

Related products

ASTM-F1396
$40.63