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BS EN ISO 25178-606:2015

BS EN ISO 25178-606:2015

$167.15

Geometrical product specification (GPS). Surface texture: Areal – Nominal characteristics of non-contact (focus variation) instruments

Published By Publication Date Number of Pages
BSI 2015 38
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This part of ISO 25178 defines the metrological characteristics of a particular non-contact method measuring surface texture using a focus variation (FV) sensor.

PDF Catalog

PDF Pages PDF Title
6 Foreword
8 Introduction
9 1 Scope
2 Normative references
3 Terms and definitions
10 3.1 Terms and definitions related to all areal surface texture measurement methods
17 3.2 Terms and definitions related to x- and y-scanning systems
19 3.3 Terms and definitions related to optical systems
21 3.4 Terms and definitions related to optical properties of the workpiece
3.5 Terms and definitions specific to focus variation instruments
24 4 Description of the influence quantities
4.1 General
25 4.2 Overview
4.3 Influence quantities
27 Annex A (informative) Components of a focus variation microscope
33 Annex B (informative) Relation to the GPS matrix model
35 Bibliography

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BS EN ISO 25178-606:2015
$167.15