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BS IEC 62047-42:2022

BS IEC 62047-42:2022

$142.49

Semiconductor devices. Micro-electromechanical devices – Measurement methods of electro-mechanical conversion characteristics of piezoelectric MEMS cantilever

Published By Publication Date Number of Pages
BSI 2022 24
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PDF Catalog

PDF Pages PDF Title
2 undefined
3 CONTENTS
5 FOREWORD
7 1 Scope
2 Normative references
3 Terms and definitions
8 4 Test bed of MEMS piezoelectric thin film
4.1 General
Figures
Figure 1 – Test bed of piezoelectric MEMS unimorph cantilever
9 Tables
Table 1 – Symbols and designations of test bed
10 4.2 Functional blocks and components
4.2.1 General
Figure 2 – Setup for measurement of converse piezoelectric effect
11 4.2.2 Displacement meter
4.2.3 Power source
4.2.4 Electric measurement instrument
Figure 3 – Setup for measurement of direct piezoelectric effect
12 5 Microcantilever under testing
5.1 General
5.2 Measurement principle
13 5.3 Measuring procedures of converse transverse piezoelectric coefficient
5.4 Measuring procedures of direct transverse piezoelectric coefficient
14 6 Test report
16 Annex A (informative) Example of measuring method of piezoelectric MEMS cantilever
A.1 General
A.2 Measurement procedure
A.2.1 Structure of piezoelectric microcantilevers
A.2.2 Microfabrication process
Figure A.1 – Structure and photograph of piezoelectric microcantilevers under testing
17 A.2.3 Mechanical properties of piezoelectric and non-piezoelectric layers
Figure A.2 – Fabrication process of piezoelectric microcantilevers
Table A.1 – Mechanical properties of piezoelectric layer
18 A.2.4 Electric properties and resonance frequency of microcantilever
Table A.2 – Mechanical properties of non-piezoelectric layer
Table A.3 – Electric properties of microcantilever
Table A.4 – Resonance frequencies of microcantilever
19 A.2.5 Input displacement of microcantilever for direct piezoelectric coefficient ed31,f
Figure A.3 – Frequency response of tip displacementof each piezoelectric microcantilevers
Table A.5 – Input displacement for direct piezoelectric coefficient ed31,f
20 A.3 Measurement results
A.3.1 Converse piezoelectric measurement
A.3.2 Direct piezoelectric measurement
Figure A.4 – Tip displacement and converse piezoelectric coefficient as a function of applied voltage
Figure A.5 – Direct piezoelectric coefficient as a function ofinput tip displacement of piezoelectric microcantilevers
21 A.4 Test report
Table A.6 – Test report
23 Bibliography

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BS IEC 62047-42:2022
$142.49