šŸ”„šŸ”„ Donā€™t Miss Out on Our End of Autumn Sale. If you have any questions, feel free to click the bottom right corner to contact our customer service..

Concat us[email protected]
Shopping Cart

No products in the cart.

šŸ”
BS IEC 62047-44:2024

BS IEC 62047-44:2024

$102.76

Semiconductor devices. Micro-electromechanical devices – Test methods for dynamic performances of MEMS resonant electric-field-sensitive devices

Published By Publication Date Number of Pages
BSI 2024 22
PDF Format Searchable Printable Preview Now
Guaranteed Safe Checkout
Categories: ,

If you have any questions, feel free to reach out to our online customer service team by clicking on the bottom right corner. Weā€™re here to assist you 24/7.
Email:[email protected]

PDF Catalog

PDF Pages PDF Title
2 undefined
4 CONTENTS
6 FOREWORD
8 1 Scope
2 Normative references
3 Terms and definitions
9 4 Essential ratings and characteristics
4.1 Composition of MEMS resonant electricā€‘fieldā€‘sensitive devices
4.2 Identification and types
4.3 Description of application and specification
4.4 Recommended operating conditions
Figures
Figure 1 ā€“ Terminals of MEMS resonant electricā€‘fieldā€‘sensitive devices
10 4.5 Additional information
5 Dynamic characteristics
5.1 Resonant frequency
5.2 Quality factor Q
5.3 Response time
6 Measuring methods
6.1 General
11 6.2 Resonant frequency
6.2.1 Purpose
6.2.2 Optical test method
Figure 2 ā€“ Diagram of the MEMS resonant electricā€‘fieldā€‘sensitive device on the parallel plate system
12 Figure 3 ā€“ Test system diagram of optical test method
13 6.2.3 Electrical test method
Figure 4 ā€“ Test system diagram of electrical test method
14 6.2.4 Data processing method
6.2.5 Specified conditions
6.3 Quality factor (Q)
6.3.1 Purpose
6.3.2 Circuit diagram
6.3.3 Principle of measurement
15 6.3.4 Precaution to be observed
6.3.5 Measurement procedure
6.3.6 Data processing method
6.3.7 Specified conditions
6.4 Response time
6.4.1 Purpose
6.4.2 Circuit diagram
6.4.3 Principle of measurement
6.4.4 Precaution to be observed
6.4.5 Measurement procedure
16 6.4.6 Data processing method
6.4.7 Specified conditions
17 Annex A (informative)Work principle and general description of MEMS resonant electricā€‘fieldā€‘sensitive devices
18 Figure A.1 ā€“ Example for working principle of MEMS resonant electricā€‘fieldā€‘sensitive device
19 Annex B (informative)Sensitive structure and test of typical MEMS resonant electricā€‘fieldā€‘sensitive devices
B.1 Electrostatically driven MEMS resonant electricā€‘fieldā€‘sensitive devices
Figure B.1 ā€“ Example for electrostatically driven MEMS resonant electricā€‘fieldā€‘sensitive device
20 B.2 Thermally driven MEMS resonant electricā€‘fieldā€‘sensitive devices
Figure B.2 ā€“ Circuit diagram of electrical test system of electrostatic comb type electricā€‘fieldā€‘sensitive device
Figure B.3 ā€“ Example for thermally driven MEMS resonant electricā€‘fieldā€‘sensitive devices
21 B.3 Piezoelectrically driven MEMS resonant electricā€‘fieldā€‘sensitive devices
Figure B.4 ā€“ Example for piezoelectrically driven MEMS resonant electricā€‘fieldā€‘sensitive devices

Related products

BS IEC 62047-44:2024
$102.76