BS ISO 15471:2016 – TC:2020 Edition
$134.27
Tracked Changes. Surface chemical analysis. Auger electron spectroscopy. Description of selected instrumental performance parameters
| Published By | Publication Date | Number of Pages |
| BSI | 2020 | 31 |
PDF Catalog
| PDF Pages | PDF Title |
|---|---|
| 21 | Foreword |
| 22 | Introduction |
| 24 | 1 Scope 2 Normative references 3 Terms and definitions 4 Symbols and abbreviated terms 5 Description of selected instrumental performance parameters 5.1 Method of analysis |
| 25 | 5.2 Samples 5.3 System configuration 5.4 Electron gun cathode 5.4.1 Cathode type 5.4.2 Cathode lifetime 5.5 Lateral resolution and beam current 5.5.1 General 5.5.2 Method 1 |
| 26 | 5.5.3 Method 2 5.5.4 Method 3 5.6 Spectrometer intensity performance and energy resolution 5.6.1 General 5.6.2 Method 1 |
| 27 | 5.6.3 Method 2 5.7 Spectrometer energy scale 5.8 Spectrometer intensity linearity 5.9 Spectrometer response function 5.10 Spectrometer parameters 5.10.1 Spectrometer aberration 5.10.2 Analytical area 5.11 Image drift 5.12 Vacuum environment |
| 28 | Bibliography |
