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BS ISO 18116:2005

$142.49

Surface chemical analysis. Guidelines for preparation and mounting of specimens for analysis

Published By Publication Date Number of Pages
BSI 2005 26
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PDF Pages PDF Title
3 TitlePage – Surface chemical analysis�— Guidelines for preparation and mounting of specimens for …
5 TableofContent – Contents Page
7 Foreword – Foreword
8 Introduction – Introduction
9 Scope – 1��� Scope
NormativeReference – 2��� Normative references
Clause1 – 4��� Symbols and abbreviated terms
Clause1 – 5��� General requirements
10 Clause1 – 6��� Visual inspection of the specimen
Clause1 – 7��� Specimen considerations
Subclause2 – 7.1��� History
Subclause2 – 7.2��� Information sought
Subclause2 – 7.3��� Specimens previously examined by other analytical techniques
11 Clause1 – 8��� Sources of specimen contamination
Subclause2 – 8.1��� Tools, gloves, mounts and similar materials
Subclause2 – 8.2��� Exposure to gases
Subclause2 – 8.3��� Exposure to instrumental vacuum
Subclause2 – 8.4��� Exposure to electrons, ions, and X-rays
12 Subclause2 – 8.5��� Contamination of the analytical chamber
Clause1 – 9��� Specimen storage and transfer
Subclause2 – 9.1��� Storage time
Subclause2 – 9.2��� Storage containers
Subclause2 – 9.3��� Temperature and humidity
13 Subclause2 – 9.4��� Specimen transfer
Clause1 – 10��� Specimen mounting procedures
Subclause2 – 10.1��� General procedures
Subclause2 – 10.2��� Powders and particles
14 Subclause2 – 10.3��� Wires, fibres and filaments
Subclause2 – 10.4��� Pedestal mounting
Subclause2 – 10.5��� Reduction of thermal damage during analysis
Clause1 – 11��� Methods for reducing specimen charging
Subclause2 – 11.1��� General considerations
Subclause2 – 11.2��� Conductive mask, grid, wrap or coating
15 Subclause2 – 11.3��� Flood gun
Subclause2 – 11.4��� Electron and ion beams
Subclause3 – 11.4.1��� Angle of incidence of the primary beam in AES
Subclause3 – 11.4.2��� Energy of the primary beam in AES and SIMS
Subclause3 – 11.4.3��� Current density of the primary beam in AES and SIMS
Subclause3 – 11.4.4��� Combined electron and ion beams in AES
Clause1 – 12��� Specimen preparation techniques
Subclause2 – 12.1��� General considerations
Subclause2 – 12.2��� Mechanical separation
16 Subclause2 – 12.3��� Thinning versus removal
Subclause2 – 12.4��� Removal of the substrate
Subclause2 – 12.5��� Sectioning techniques
Subclause3 – 12.5.1��� General information
Subclause3 – 12.5.2��� Sectioning methods
Subclause3 – 12.5.3��� Angle lapping
Subclause3 – 12.5.4��� Ball cratering
17 Subclause3 – 12.5.5��� Radial sectioning
Subclause3 – 12.5.6��� Mechanical polishing
Subclause3 – 12.5.7��� Chemical and electrochemical polishing
Subclause3 – 12.5.8��� Crater edge profiling
Subclause3 – 12.5.9��� Focused ion beam sectioning
Subclause2 – 12.6��� Growth of overlayers
Subclause2 – 12.7��� Solvents
18 Subclause2 – 12.8��� Chemical etching
Subclause2 – 12.9��� Ion sputtering
Subclause3 – 12.9.1��� General information
Subclause3 – 12.9.2��� Altered layer
Subclause3 – 12.9.3��� Preferential sputtering
Subclause3 – 12.9.4��� Chemical changes
Subclause3 – 12.9.5��� Sputtering with hydrogen
Subclause3 – 12.9.6��� Changes of surface and interface topography
19 Subclause3 – 12.9.7��� Sputtering and heating
Subclause3 – 12.9.8��� Sputter-enhanced diffusion
Subclause2 – 12.10��� Plasma etching
Subclause2 – 12.11��� Heating
Subclause2 – 12.12��� Ultraviolet radiation
20 Clause1 – 13��� Fracturing, cleaving and scribing
Subclause2 – 13.1��� Fracture
Subclause3 – 13.1.1��� General information
Subclause3 – 13.1.2��� Preparation of specimens
Subclause2 – 13.2��� Cleaving
Subclause2 – 13.3��� Scribing
21 Clause1 – 14��� Special specimen-handling techniques
Subclause2 – 14.1��� Prepumping of gassy specimens
Subclause2 – 14.2��� Viscous liquids
Subclause2 – 14.3��� Solute residue
22 Bibliography – Bibliography
BS ISO 18116:2005
$142.49