BSI 18/30383935 DC:2018 Edition
$13.70
BS EN IEC 62047-37. Semiconductor devices. Micro-electromechanical devices – Part 37. Environmental test methods of MEMS piezoelectric thin films for sensor application
| Published By | Publication Date | Number of Pages |
| BSI | 2018 | 19 |
| Status | Definitive |
|---|---|
| Pages | 19 |
| Publication Date | 2018-12-04 |
| Standard Number | 18/30383935 DC |
| Title | BS EN IEC 62047-37. Semiconductor devices. Micro-electromechanical devices – Part 37. Environmental test methods of MEMS piezoelectric thin films for sensor application |
| Identical National Standard Of | IEC 62047-37 Ed.1.0 |
| Descriptors | Durability, Sensors, Thin films, Test methods, Semiconductor devices, Electromechanical storage, Environmental testing, Piezoelectric devices |
| Publisher | BSI |
| Committee | EPL/47 |
| ICS Codes | 31.080.01 - Semiconductor devices in general |
