{"id":417112,"date":"2024-10-20T06:14:24","date_gmt":"2024-10-20T06:14:24","guid":{"rendered":"https:\/\/pdfstandards.shop\/product\/uncategorized\/bs-en-62047-182013-2\/"},"modified":"2024-10-26T11:36:22","modified_gmt":"2024-10-26T11:36:22","slug":"bs-en-62047-182013-2","status":"publish","type":"product","link":"https:\/\/pdfstandards.shop\/product\/publishers\/bsi\/bs-en-62047-182013-2\/","title":{"rendered":"BS EN 62047-18:2013"},"content":{"rendered":"

This part of IEC 62047 specifies the method for bend testing of thin film materials with a length and width under 1 mm and a thickness in the range between 0,1 \u00b5m and 10 \u00b5m. Thin films are used as main structural materials for Micro-electromechanical Systems (abbreviated as MEMS in this document) and micromachines.<\/p>\n

The main structural materials for MEMS, micromachines, etc., have special features, such as a few micron meter size, material fabrication by deposition, photolithography, and\/ or non-mechanical machining test piece. This International Standard specifies the bend testing and test piece shape for micro-sized smooth cantilever type test pieces, which enables a guarantee of accuracy corresponding to the special features.<\/p>\n

PDF Catalog<\/h4>\n\n\n\n\n\n\n\n\n\n\n\n\n
PDF Pages<\/th>\nPDF Title<\/th>\n<\/tr>\n
6<\/td>\nEnglish
CONTENTS <\/td>\n<\/tr>\n
7<\/td>\n1 Scope
2 Normative references <\/td>\n<\/tr>\n
8<\/td>\n3 Symbols and designations
4 Test piece
4.1 Design of test piece
Figures
Figure 1 \u2013 Schematically shown test piece with substrate
Tables
Table 1 \u2013 Symbols and designation of test piece <\/td>\n<\/tr>\n
9<\/td>\n4.2 Preparation of test piece
4.3 Test piece width and thickness
4.4 Storage prior to testing
5 Testing method
5.1 General <\/td>\n<\/tr>\n
10<\/td>\nFigure 2 \u2013 Measurement method <\/td>\n<\/tr>\n
11<\/td>\n5.2 Method for mounting of test piece
5.3 Method for loading
5.4 Speed of testing
5.5 Displacement measurement
5.6 Test environment
5.7 Data analysis <\/td>\n<\/tr>\n
12<\/td>\n6 Test report
5.8 Material for test pieces <\/td>\n<\/tr>\n
13<\/td>\nAnnex A (informative) Precautions for the test piece\/substrate interface
Figure A.1 \u2013 Finishing angle of substrate contact area with test piece <\/td>\n<\/tr>\n
14<\/td>\nAnnex B (informative) Precautions necessary for the force displacement relationship
Figure B.1 \u2013 Cantilever type bend test piece of metallic glass in accordance with IEC\u00a062047-18 <\/td>\n<\/tr>\n
15<\/td>\nFigure B.2 \u2013 Typical example of relationship between force and displacement <\/td>\n<\/tr>\n<\/table>\n","protected":false},"excerpt":{"rendered":"

Semiconductor devices. Micro-electromechanical devices – Bend testing methods of thin film materials<\/b><\/p>\n\n\n\n\n
Published By<\/td>\nPublication Date<\/td>\nNumber of Pages<\/td>\n<\/tr>\n
BSI<\/b><\/a><\/td>\n2013<\/td>\n18<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n","protected":false},"featured_media":417122,"template":"","meta":{"rank_math_lock_modified_date":false,"ep_exclude_from_search":false},"product_cat":[577,2641],"product_tag":[],"class_list":{"0":"post-417112","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-31-080-99","7":"product_cat-bsi","9":"first","10":"instock","11":"sold-individually","12":"shipping-taxable","13":"purchasable","14":"product-type-simple"},"_links":{"self":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product\/417112","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/types\/product"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/media\/417122"}],"wp:attachment":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/media?parent=417112"}],"wp:term":[{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product_cat?post=417112"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product_tag?post=417112"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}