{"id":9890,"date":"2024-10-16T20:07:50","date_gmt":"2024-10-16T20:07:50","guid":{"rendered":"https:\/\/pdfstandards.shop\/product\/uncategorized\/nfpa-318\/"},"modified":"2024-10-24T11:16:45","modified_gmt":"2024-10-24T11:16:45","slug":"nfpa-318","status":"publish","type":"product","link":"https:\/\/pdfstandards.shop\/product\/publishers\/nfpa\/nfpa-318\/","title":{"rendered":"NFPA 318"},"content":{"rendered":"<p><strong>Today&#8217;s <em>NFPA 318<\/em> safeguards people and property in plants and research facilities.<\/strong><\/p>\n<p><em>NFPA 318: Standard for the Protection of Semiconductor Fabrication Facilities<\/em> applies to semiconductor fabrication facilities and comparable R&amp;D areas in which hazardous chemicals are used, stored, and handled&#8211;containing a cleanroom or clean zone or both. For the 2009 edition, the document&#8217;s scope was revised to apply to semiconductor fabrication facilities and areas with comparable fabrication processes and risks.<\/p>\n<p><strong>Major technical changes for 2009 include:<\/strong><\/p>\n<ul>\n<li>First-time requirements for Sub Atomic Gas (SAG) Systems<\/li>\n<li>New requirements involving exhaust ducts<\/li>\n<li>Maximum hazardous chemical quantities at a workstation limited to 3 cylinders to reduce change-out frequency<\/li>\n<li>Revisions to safety considerations for chemical storage and handling, hazardous gas cylinder storage and distribution, bulk silane systems, and production and support equipment<\/li>\n<\/ul>\n<p>Facility owners and managers, plant safety directors, safety trainers, risk insurers, and AHJs need the latest requirements based on industry needs, new technology, and recent experience.<\/p>\n<h4>PDF Catalog<\/h4>\n<table border=\"1px\" class=\"des-table\">\n<tr>\n<th>PDF Pages<\/th>\n<th>PDF Title<\/th>\n<\/tr>\n<tr>\n<td><b>2<b><\/td>\n<td>Important Notices and Disclaimers <br \/> Important Notices and Disclaimers  <\/td>\n<\/tr>\n<tr>\n<td><b>3<b><\/td>\n<td>Additional Notices and Disclaimers <br \/> Additional Notices and Disclaimers  <\/td>\n<\/tr>\n<tr>\n<td><b>4<b><\/td>\n<td>2.1 General <br \/> 2.1 General <br \/> 2.2 NFPA Publications <br \/> 2.2 NFPA Publications  <\/td>\n<\/tr>\n<tr>\n<td><b>7<b><\/td>\n<td>Chapter 1 Administration <br \/> Chapter 1 Administration <br \/> 1.1 Scope <br \/> 1.1 Scope <br \/> 1.2 Purpose <br \/> 1.2 Purpose <br \/> 1.3 Retroactivity <br \/> 1.3 Retroactivity <br \/> 1.4 Equivalency <br \/> 1.4 Equivalency <br \/> 1.5 Units <br \/> 1.5 Units <br \/> Chapter 2 Referenced Publications <br \/> Chapter 2 Referenced Publications  <\/td>\n<\/tr>\n<tr>\n<td><b>8<b><\/td>\n<td>2.3 Other Publications <br \/> 2.3 Other Publications <br \/> 2.4 References for Extracts in Mandatory Sections <br \/> 2.4 References for Extracts in Mandatory Sections <br \/> Chapter 3 Definitions <br \/> Chapter 3 Definitions <br \/> 3.1 General <br \/> 3.1 General <br \/> 3.2 NFPA Official Definitions <br \/> 3.2 NFPA Official Definitions <br \/> 3.3 General Definitions <br \/> 3.3 General Definitions  <\/td>\n<\/tr>\n<tr>\n<td><b>10<b><\/td>\n<td>Chapter 4 Fire Protection <br \/> Chapter 4 Fire Protection <br \/> 4.1 Automatic Fire-Extinguishing Systems <br \/> 4.1 Automatic Fire-Extinguishing Systems  <\/td>\n<\/tr>\n<tr>\n<td><b>11<b><\/td>\n<td>4.2 Alarm Systems <br \/> 4.2 Alarm Systems <br \/> 4.3 Detection Systems <br \/> 4.3 Detection Systems <br \/> Chapter 5 Ventilation and Exhaust Systems <br \/> Chapter 5 Ventilation and Exhaust Systems <br \/> 5.1 Air Supply and Recirculation Systems <br \/> 5.1 Air Supply and Recirculation Systems <br \/> 5.2 Local Hazardous Chemical Exhaust System <br \/> 5.2 Local Hazardous Chemical Exhaust System <br \/> 5.3 Local Hazardous Chemical Exhaust System Construction <br \/> 5.3 Local Hazardous Chemical Exhaust System Construction  <\/td>\n<\/tr>\n<tr>\n<td><b>12<b><\/td>\n<td>5.4 General Conditions <br \/> 5.4 General Conditions <br \/> 5.5 Hazardous Chemical Exhaust Duct Airflow and Dilution <br \/> 5.5 Hazardous Chemical Exhaust Duct Airflow and Dilution <br \/> 5.6 Hazardous Chemical Exhaust Controls <br \/> 5.6 Hazardous Chemical Exhaust Controls <br \/> Chapter 6 Construction <br \/> Chapter 6 Construction <br \/> 6.1 Classification of Occupancy <br \/> 6.1 Classification of Occupancy <br \/> 6.2 Noncombustible Construction Components <br \/> 6.2 Noncombustible Construction Components <br \/> 6.3 Fire Resistance Rating <br \/> 6.3 Fire Resistance Rating <br \/> 6.4 Electrical Classification <br \/> 6.4 Electrical Classification <br \/> 6.5 Emergency Power System <br \/> 6.5 Emergency Power System <br \/> 6.6 Occupied Levels of Fabrication Areas <br \/> 6.6 Occupied Levels of Fabrication Areas <br \/> 6.7 Pass-Throughs in Existing Exit Access Corridors <br \/> 6.7 Pass-Throughs in Existing Exit Access Corridors  <\/td>\n<\/tr>\n<tr>\n<td><b>13<b><\/td>\n<td>6.8 Fabrication Areas <br \/> 6.8 Fabrication Areas <br \/> 6.9 Vertical Openings <br \/> 6.9 Vertical Openings <br \/> Chapter 7 Chemical Storage and Handling <br \/> Chapter 7 Chemical Storage and Handling <br \/> 7.1 Hazardous Chemicals <br \/> 7.1 Hazardous Chemicals <br \/> 7.2 Flammable and Combustible Liquid Delivery Systems <br \/> 7.2 Flammable and Combustible Liquid Delivery Systems  <\/td>\n<\/tr>\n<tr>\n<td><b>16<b><\/td>\n<td>7.3 Container Delivery <br \/> 7.3 Container Delivery <br \/> 7.4 Liquid Waste Disposal <br \/> 7.4 Liquid Waste Disposal <br \/> 7.5 Spill Protection <br \/> 7.5 Spill Protection  <\/td>\n<\/tr>\n<tr>\n<td><b>17<b><\/td>\n<td>7.6 Supply Piping <br \/> 7.6 Supply Piping <br \/> 7.7 Welding <br \/> 7.7 Welding <br \/> 7.8 Pyrophoric Liquids <br \/> 7.8 Pyrophoric Liquids <br \/> Chapter 8 Hazardous Gas Cylinder Storage and Distribution <br \/> Chapter 8 Hazardous Gas Cylinder Storage and Distribution <br \/> 8.1 Packaging <br \/> 8.1 Packaging <br \/> 8.2 Transport to the Semiconductor Facility <br \/> 8.2 Transport to the Semiconductor Facility <br \/> 8.3 Distribution Systems <br \/> 8.3 Distribution Systems  <\/td>\n<\/tr>\n<tr>\n<td><b>18<b><\/td>\n<td>8.4 Silane and Silane\/Nontoxic Mixes Storage and Dispensing Areas <br \/> 8.4 Silane and Silane\/Nontoxic Mixes Storage and Dispensing Areas <br \/> 8.5 Silane\/Toxic Mixes Storage and Dispensing Areas <br \/> 8.5 Silane\/Toxic Mixes Storage and Dispensing Areas  <\/td>\n<\/tr>\n<tr>\n<td><b>19<b><\/td>\n<td>8.6 Flammable or Toxic Gases <br \/> 8.6 Flammable or Toxic Gases  <\/td>\n<\/tr>\n<tr>\n<td><b>20<b><\/td>\n<td>8.7 Vent Headers <br \/> 8.7 Vent Headers <br \/> 8.8 Training <br \/> 8.8 Training <br \/> 8.9 Treatment Systems <br \/> 8.9 Treatment Systems <br \/> Chapter 9 Bulk Silane Systems <br \/> Chapter 9 Bulk Silane Systems <br \/> 9.1 Tube Trailer Systems <br \/> 9.1 Tube Trailer Systems  <\/td>\n<\/tr>\n<tr>\n<td><b>21<b><\/td>\n<td>9.2 Cylinder Pack Systems and 450 L (119 gal) Cylinders <br \/> 9.2 Cylinder Pack Systems and 450 L (119 gal) Cylinders <br \/> Chapter 10 Production and Support Equipment <br \/> Chapter 10 Production and Support Equipment <br \/> 10.1 General <br \/> 10.1 General <br \/> 10.2 Interlocks <br \/> 10.2 Interlocks <br \/> 10.3 Electrical Design <br \/> 10.3 Electrical Design <br \/> 10.4 Process Liquid Heating Equipment <br \/> 10.4 Process Liquid Heating Equipment  <\/td>\n<\/tr>\n<tr>\n<td><b>22<b><\/td>\n<td>10.5 Materials of Construction <br \/> 10.5 Materials of Construction <br \/> 10.6 Vacuum Pumps <br \/> 10.6 Vacuum Pumps <br \/> 10.7 Hazardous Gas Delivery Systems <br \/> 10.7 Hazardous Gas Delivery Systems <br \/> 10.8 Tools Using Flammable or Combustible Chemicals <br \/> 10.8 Tools Using Flammable or Combustible Chemicals <br \/> 10.9 Gas-Detection Systems <br \/> 10.9 Gas-Detection Systems  <\/td>\n<\/tr>\n<tr>\n<td><b>23<b><\/td>\n<td>10.10 Emergency Alarm System <br \/> 10.10 Emergency Alarm System <br \/> Chapter 11 Emergency Control Station <br \/> Chapter 11 Emergency Control Station <br \/> 11.1 Emergency Control Station <br \/> 11.1 Emergency Control Station <br \/> Chapter 12 General Safety Precautions <br \/> Chapter 12 General Safety Precautions <br \/> 12.1 Emergency Plan <br \/> 12.1 Emergency Plan <br \/> 12.2 Emergency Response Team <br \/> 12.2 Emergency Response Team <br \/> 12.3 Emergency Drills <br \/> 12.3 Emergency Drills <br \/> Chapter 13 Means of Egress <br \/> Chapter 13 Means of Egress <br \/> 13.1 Means of Egress <br \/> 13.1 Means of Egress  <\/td>\n<\/tr>\n<tr>\n<td><b>24<b><\/td>\n<td>13.2 Service Corridors <br \/> 13.2 Service Corridors <br \/> Annex A Explanatory Material <br \/> Annex A Explanatory Material  <\/td>\n<\/tr>\n<tr>\n<td><b>28<b><\/td>\n<td>Annex B Seismic Protection <br \/> Annex B Seismic Protection <br \/> Annex C Production and Support Equipment <br \/> Annex C Production and Support Equipment  <\/td>\n<\/tr>\n<tr>\n<td><b>29<b><\/td>\n<td>Annex D Informational References <br \/> Annex D Informational References  <\/td>\n<\/tr>\n<tr>\n<td><b>30<b><\/td>\n<td>Index <br \/> Index  <\/td>\n<\/tr>\n<tr>\n<td><b>32<b><\/td>\n<td>Formal Interpretation <br \/> Formal Interpretation  <\/td>\n<\/tr>\n<\/table>\n","protected":false},"excerpt":{"rendered":"<p><b> Standard for the Protection of Semiconductor Fabrication Facilities<\/b><\/p>\n<table class=\"shortdes-table\" style=\"width: 100%\" border=\"0\" cellspacing=\"0\" cellpadding=\"0\">\n<tbody>\n<tr>\n<td>Published By<\/td>\n<td>Publication Date<\/td>\n<td>Number of Pages<\/td>\n<\/tr>\n<tr>\n<td><a href=\"https:\/\/pdfstandards.shop\/product-category\/publishers\/nfpa\/\"><b>NFPA<\/b><\/a><\/td>\n<td>2009<\/td>\n<td>35<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n","protected":false},"featured_media":9891,"template":"","meta":{"rank_math_lock_modified_date":false,"ep_exclude_from_search":false},"product_cat":[2638],"product_tag":[],"class_list":{"0":"post-9890","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-nfpa","8":"first","9":"instock","10":"sold-individually","11":"shipping-taxable","12":"purchasable","13":"product-type-simple"},"_links":{"self":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product\/9890","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/types\/product"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/media\/9891"}],"wp:attachment":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/media?parent=9890"}],"wp:term":[{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product_cat?post=9890"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product_tag?post=9890"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}